Solver LS is a cutting-edge solution not only for scientific research, but also for production monitoring. With this sophisticated tool you can investigate and control samples (wafers) with the size up to 250mm (300mm optional) in diameter and 15mm thick. The motorized positioning stage and optical viewing system, which are included in Solver LS, allow you to choose any place visually and define a number of areas in different parts of the sample to be scanned automatically. Due to a great number of features Solver LS is abundantly given, the range of application is almost endless.
Up to 250 mm (300 mm optional) in diameter, up to 15 mm thick
50x50x2.5 μm (±10%)
Vacuum sample holder for CD/DVD discs, stampers and glass master discs; universal vacuum sample holder for semiconductor wafers (50 - 150 mm) (250 mm optional), CD/DVD stampers, HDD and small samples (min. size is 10mm in diameter)
Linear and rotary translation stages;
linear resolution - 2μm;
bidirectional repeatability - 1μm;
angular resolution - 0.002 degree;
angular repeatability - 0.0014 degree
50 pA - 10 nA (linear range), RMS noise 4 pA in 1 kHz bandwidth
10 nA - 10 mA (log range)
Optical viewing system
Magnification: with color CCD on 14" monitor 207- 2070
Field of view: max 1.2x0.9 mm, min 120x90 μm
Motorized focus and zoom, control unit
Color CCD camera (SONY SSC-DC50AP 1/2" CCD, 470 TVL), color monitor 14" (SONY SSM- 14N5E horizontal resolution 500 TVL).
Passive isolation is integrated.
Active anti-vibration system is available by request.