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Ntega Prima




Product Features

  • Equipped with a replaceable scanner with integrated capacitance sensors. A scan range of 100x100x12 um is available.
  • XY nonlinearity: 0.05% of Peak-to-Peak by 2 value, after correction.
  • Position repeatability in the X-Y plane is maintained with an accuracy of 10-20 nm in full scan range.
  • The DualScan mode is performed with the use of the replaceable lower scanner (100x100x12 um) and another (100x100x10 um) upper scanner, which gives the total scan range of 200x200x22 um.
  • The PNL controller and the mechanical parts of the PNL NTEGRA can operate in high-frequency modes, up to 5 MHz. This makes it possible to use the system both for AFAM applications and for operations with high-frequency cantilevers.
  • This system can be used in research of high-resistance materials such as thin dielectric layers on semiconductors, DLC and piezo-films, conductive polymers etc. 



    Scanning probe Microscopy

    In air&liquid: AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/ Force Modulation/ Adhesion Force Imaging/ Lithography: AFM (Force) In air only: STM/ Magnetic Force Microscopy/ Electrostatic Force Microscopy/ Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Current), STM/ AFAM (optional)


    Scan type

    Scanning by sample

    Scanning by probe*

    Sample size

    Up to 40 mm in diameter, to 15 mm in height

    Up to 100 mm in diameter, up to 15 mm in height

    Sample weight

    Up to 100 g

    Up to 300 g

    XY sample positiniong range

    5x5 mm

    Positioning resolution

    Readable resolution -5 um
    Sensitivity -2 um

    Scan range

    100x100x10 um
    3x3x2,6 um

    100x100x10 um
    50x50x5 um

    Up to 200x200x20 um**(DualScan™mode)

    Non linearity, XY
    (with closed loop sensors)

    ≤ 0.1%

    ≤ 0.15%

    Noise level, Z
    (RMS in bandwidth 1000Hz)

    With sensors

    0.04 nm (typically),
    ≤ 0.06 nm

    0.06 nm (typically),
    ≤ 0.07 nm

    Without sensors

    0.03 nm

    0.05 nm

    Noise level, XY***
    (RMS in bandwidth 200Hz)

    With sensors

    0.2 nm (typically),
    ≤ 03 nm (XY 100 um)

    0.1 nm (typically),
    ≤ 0.2 nm (XY 50 um)

    Without sensors

    0.02 nm (XY 100 um),
    0.001 nm (XY 3 um)

    0.01 nm (XY 50 um)

    Linear dimension estimation error (with sensors)



    Optical viewing system

    Optical resolution

    1 um (0.4 um optional, NA 0.7)****

    3 um

    Field of view

    4.5 - 0.4 mm

    2.0 - 0.4 mm

    Continuous zoom



    Vibration isolation


    0.7-1000 Hz


    Above 1 kHz

    * Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
    ** Optionally can be expanded to 200x200x20 m.
    *** Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.
    **** High Resolution Viewing system (HRV head) is optional and provides additional functionality making it possible to generate and detect tip-localized aperture less near-field effects.

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